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Next Generation Molding Compound Materials for Flip Chip Matrix Array Molded Packages

Next Generation Molding Compound Materials for Flip Chip Matrix Array Molded Packages
Next Generation Molding Compound Materials for Flip Chip Matrix Array Molded Packages

Next Generation Molding Compound Materials for Flip Chip Matrix Array

Molded Packages

Lim Chong Sim a, Mun Leong Loke a, Kang Eu Ong a, Enrico Garcia a, Mohamed Syazwan Osman a, Leonel Arana b, Yoshihiro Tomita c, and Jiro Kubota c

a Assembly & Test Technology Development – Malaysia, Kulim, Malaysia

b Chandler Assembly Technology Development, Assembly & Test Technology Development, Chandler, Arizona

c Pathfinding, Assembly & Test Technology Development, Tsukuba, Japan

lim.chong.sim@https://www.sodocs.net/doc/0117221314.html,

Abstract—This manuscript describes the recent pathfinding and development activities on the molding compound for the flip chip matrix molded array (FCMX) platforms. The key focus of this manuscript is on the materials and packaging challenges associated with the high K molding compound and exposed second level interconnect molding. In addition the advantages and disadvantages of transfer and compression molding are discussed.

1. Introduction

FCMX packages are the next generation of packaging technologies designed for the mobility and ultra mobility product segments. Over the last few years, the mobile computing technologies have evolved into increasingly complex systems, resulting in significant packaging challenges. The key challenges often associated with the FCMX platforms are strip warpage, which could potentially result in high yield loss for the downstream modules. High strip warpage may also lead

to excessive package warpage, potentially violating the outgoing coplanarity specifications by the Joint Electron Device Engineering Council (JEDEC), which stipulates that a package with a ball grid array (BGA) pitch of < 0.5mm needs to meet an outgoing ball-coplanarity specification of under 100um.

Various technology options have been explored previously to address the warpage concerns. This includes having the right media design to restrain the strips from warping during the assembly process flow. Although media acts as an effective restrainer, it is an expensive solution, which would typically require some level of compromise within the assembly process flow

to enable integration of the media solution. Therefore from the manufacturability perspective, molding compound still remains as the most viable option for warpage controls.

In this manuscript, discussions are focused on the molding compound issues and requirements for the different packaging technologies. Sections 3 and 4 are focused on flip chip matrix molded ball grid array generation 3 (FCMB3) high K molding compound development, while Section 5 focuses on the flip chip matrix molded ball grid array generation 4 (FCMB4) ultra long gellation compression mold formulation. In addition the different molding compound technologies that drive the formulation developments are described. 2. Background: Molding Compound Drivers 2.1. Generic Molding Compound Requirements

The main function of molding compound is to protect the package from moisture, thermal and environmental exposure to ensure that it’s able to withstand its stipulated reliability requirements. In addition molding compound provides the package with the robustness for mechanical handling, packaging and assembly. Overall the molding compound requirements can be further summarized to the following key items:

?Low moisture absorption – “Pop-corning”

phenomenon occurs because of pressure building

up from the out gassing of moisture within the packages during the level 3 preconditioning (L3P)

stress resulting in interfacial or bulk fracture. In general, moisture absorption is lower for lower Glass Transition (T g ) resins such as the biphenyl

due to the lower free volume within the cross-

linked resins.

?Adhesion to multiple interface – Good adhesion to multiple interfaces such as underfill, solder resist

and silicon die is an important criteria to ensure

that there is no delamination between the interfaces

during assembly, which could result in crack propagation during temperature cycle stress.

?Low cure shrinkage – One of the key factors affecting strip warpage is the shrinkage of the molding compound during curing. Cure shrinkage

is defined by the differences between the total shrinkage with the thermal shrinkage.

Given the contrasting differences in packaging architecture between FCMB3 and FCMB4 (to be discussed further in sections 3 and 5), a generic molding compound requirements is not sufficient to

meet the overall package performance. Therefore a significant amount of work was done to formulate different molding compound formulations to meet the competing needs of each packaging technology options.

2.2. FCMX Packaging Roadmaps and Trends

Figure 1 shows the projected packaging trends for the

FCMX platforms, which is based on the dimensional scaling of the transistor’s density and customer’s requirements. The key driver is the scaling of power delivery requirements due to an increase in transistors density in order to meet the customer’s request for an increase in functionality. This consequently results in an increase in junction temperature, which reduces the silicon performance. The other driver which is based on projected customer requirements is the dimensional scaling of the package Z height requirements, which results in a lower silicon thickness and a thinner substrate technology.

Figure 1. Projected packaging trends for FCMX platforms.

2.3. New or Complex Packaging Technology

The emergence of new and complex packaging technologies due to design constrains have resulted in a new set of molding compound requirements. Figure 2 illustrates the revisions in packaging architectures that the FCMB4 pathfinding platform has undertaken due to changes in the product specific roadmaps (PSR). In general, both the overmold and exposed second level interconnect packages are assembled using the 1269 silicon architecture on a high density interconnect (HDI) direct laser lamination (DLL3) strip technology, which is attained through the laminations of multiple build up materials with laser via [1]. The key

advantages of the coreless DLL3 strip is the increase in signaling rates for high speed inputs outputs (HSIO) requirements and a reduction in the overall strip Z height. However this technology suffers from several drawbacks, including high warpage due to reduced thickness and absence of a core, which consequently results in yield loss at chip attach. The details on both the packaging technologies (1) Discrete over mold package and (2) Exposed second level interconnect molding will be discussed in details in the following sections.

Figure 2. Revisions in FCMB4 Packaging Architecture

2.4. Transfer vs. Compression Molding

Transfer molding has been Intel’s? legacy molding compound process for the Flip chip molded matrix array package 1 (FCMMAP 1), wire bonded and Flash platforms. However moving forward, the scalability for the transfer mold is at stake due to product requirements for a thinner mold clearance and lower temperature processing. Internal data collection on a package with 100um mold clearance indicated that the present transfer mold technology would be broken for molding compound with spiral flow <110cm as shown in Figure 3.

Figure 3. Projected packaging trends for FCMX platforms.

For the transfer molding process, molding compound pellets are placed into the plunger pots of the heated mold chase as shown in Figure 4. Once the mold compound is molten, the plunger transfers the molding compound through the runners into the cavity of the mold chase, and air in the chase cavities is vented out through strategically located venting holes. To ensure complete mold fill throughout the cavity of the mold chase, it’s important to define the right flow and melt viscosity properties. Nevertheless this is still a challenge for the high K molding compound

formulation because of the increase in melt viscosity with higher filler loading.

Figure 4. Transfer molding bottom chase with plunger pots.

The other known molding technique which was recently explored during the FCMB4 pathfinding is the compression mold. Compression mold shown in Figure 5 can be thought of as a runnerless mold system, because the molding compound is placed directly into

the cavity of the mold chase prior to clamping [2]. The

compression molding technique is unique because of its

ability to support both powder and liquid molding compound formulation. In addition compression mold has been demonstrated to be able to achieve thinner mold cap clearance. Compared to the transfer mold process, compression mold drives a reduction in through put time (TPT) with the omission of the molding compound transfer process shown in Figure 6.

Figure 5. Compression molding bottom chase filled with mold.

Figure 6. Potential TPT reduction with compression mold.

From the materials perspective, compression molding drives a separate set of requirements compared to the transfer molding formulations. For instance lubrication

wax is not required in the formulation because of the presence of mold film, which prevents the molding compound from sticking to the mold chase. In addition compression molding compound formulation typically requires a longer gelation time to enable it to flow and fill up the cavities within the mold chase.

2.5. Critical Molding Parameters

Among the key critical factors for warpage reduction is design geometry, materials properties and processing conditions. From the materials perspective, key

properties that influence the outcome of strip warpage

are shrinkage factor, glass transition temperatures (T g ), coefficient of thermal expansion (CTE) and the modulus. Shrinkage factor is a dominant force for warpage control at room temperature, while the T g and CTE are crucial to controlling the dynamic warpage of the strips at reflow temperatures because of CTE mismatch.

2.6. Test Vehicle Comparisons

Various test vehicles (TV) were designed and taped out during the FCMB3 development phase and FCMB4 pathfinding phase as shown in Table 1. The key differences between both the platforms lie with the substrate technology used. FCMB3 Pinang TV is an LDI substrate with a core, while the FCMB4 Joslin 2 and Tonkin TV are DLL3 strips designed to meet the high

density design rules. Due to the absence of cores, DLL3 strips are very flimsy, with high incoming warpage variations.

Table 1. Test Vehicle comparison between FCMB3 and FCMB4.

FCMB3 FCMB4 Attributes Pinang Joslin 2 Tonkin Die size 11 x 11mm 8 x 6mm 11 x 11mm Package size 13.8 x 13.8mm 13.8 x 13.8mm 13.8 x 13.8mm Substrate LDI DLL3 HDI DLL3 HDI

Silicon 1266 1266 1268 Ball pitch

0.5mm 0.413mm 0.5mm

3. High K Molding Compound for

Overmolded Package

80% Others MHS

Mold cure

60%

Clamp Injection

3.1. Motivation for High K Mold Compound Technology Traditionally, for an over molded package (e.g FCMB3), the key challenge is to enable an effective heat dissipation path from the silicon to ensure that the overall package is meeting the TDP requirements. This is because any increment in temperature by a magnitude of 10-15o C above the T j limit of 110o C may result in a 2X difference in the lifespan of the device [3]. Technology roadmaps have projected that the future FCMX platform may be required to envelop products with power dissipations up to 35 Watts, thus emphasizing the need for an effective package and

40%

T i m e

20% 0%

Transfer mold

Compression mold WB Compression mold FC Process material optimization

system level thermal solutions. Figure 7 shows that 90% of the heat generated by the silicon is dissipated through the board, and the remaining 10% dissipated to the surroundings via convection. This shows that molding compound could play an effective role in heat dissipation by virtue of providing a larger surface area for heat flow.

Figure 7. Heat transfer path for a typical FCMX package.

Thermal modeling in Table 2 has indicated that the conventional silica (SiO 2) filled molding compound formulation with a thermal conductivity value of

around 0.8W/mK would not be able to meet the Thermal Design Power (TDP) targets for a 5 Watts power dissipation product. Instead a 3.2 W/m.K molding compound would be required.

Table 2. T j max estimation based on 150um mold clearance.

To increase its thermal conductivity, various thermally conductive ceramic fillers such as Alumina (Al 2O 3) and Silicon Carbide (SiC) were investigated. The addition

of thermally conductive fillers adversely impacts the

molding compound properties (higher CTE, higher modulus and shorter spiral flow). Therefore, the challenge lies in developing a thermally conductive molding compound technology, which is processable.

3.2. High K Molding Compound Formulations

Market survey on existing suppliers showed that the high K molding compound is a generally new formulation with low levels of market penetration within the industries. Therefore collaborations with several of the molding compound suppliers were formed to specially develop a formulation that will meet Intel’s thermal conductivity requirements of 5W/m.K. The key factors considered in the formulation were the choice of fillers and resin chemistries. For this a variety of ceramic fillers such as Al 2O 3, Silicon Carbide (SiC) and Aluminum Nitride (AlN) were all considered to enhance the thermal conductivity of the molding compound as shown in Table 3. Each of these fillers has their own sets of advantages and disadvantages. For instance although AlN fillers have the highest bulk thermal conductivity of ~270 W/m.K, it is still an unsuitable choice because of its hygroscopic nature which results in it being easily reversible into Al(OH)3 and ammonia (NH 3) under the presence of moisture [4].

Table 3. Physical properties of thermal conductive fillers.

Al 2O 3

SiC AlN Density (g/cm 3) 4.00 3.22 3.26

CTE (10-6o C -1

) 7.60 4.51 4.40 Thermal conductivity (W/m.K) 30 220 270 Dielectric constant – 1MHz (k) 9.3 8.9 8.9 Young Modulus (GPa) 386 400 308

As discussed in the previous sections, it’s important to strike a balance between the thermal conductivity targets with the flowability of the material. Figure 8 shows the correlation between melt viscosities and thermal conductivity. From the graphs it was established that the increment in filler ratio not only increases the thermal conductivity but also drives an increase in melt

viscosities due to an increase in filler-matrix interactions. Some of the typical approaches used by molding compound suppliers to control the melt viscosities include selecting a lower viscosity resin to begin with.

For this the biphenyl resin is somewhat a preferred option among the molding compound suppliers because of its low moisture uptake and good adhesion to multiple interfaces. In addition melt viscosities can be controlled by optimizing the filler distribution ratio and the hardener system used.

1000

Thermal conductivity Melt viscosity 6100

Figure 8. Correlation between thermal conductivity and melt viscosity.

Table 4 shows the list of all the molding compound materials which were evaluated during the FCMB4 pathfinding time frame. They include the X-43-3244-2 formulation, which serves as the baseline for data collection. The other formulations are the X-43-3248-1A and X-43-3248-1C, which were reiterations from the X-43-3248-1 formulation. The key differences between the materials lie in the filler systems used. To achieve a thermal conductivity of ~5W/m.K, the filler loading (wt%) of Al 2O 3 + SiO 2 fillers for the X-43-3248-1A formulation were increased from 75wt% to 77wt%,

1030102030 40 Vol.% T h e r m a l c o n d u c t i v i t y (W /m .K )

M e l t v i s c o s i t y a .s )

(P

while for the X-43-3248-1C formulation, the SiO2 fillers were replaced with higher conductive SiC fillers. In addition silicone particles were added into the formulations to act to prevent excessive mold shrinkage during the curing process.

Table 4. High K molding compound formulation comparison. Supplier

(Materials)

Material description Key properties

Shin-Etsu (X-43-3244-2) FCMB3 baseline

Multi functional resin, 75

Vol% Al2O3 + SiO2

hybrid

T g – 183o C

CTE 1/2 – 14/43ppm

K – 3.2W/m.K

Spiral flow – 88cm

Shin-Etsu (X-43-3248-1) Biphenyl resin, 75 Vol%

Al2O3 + SiO2 hybrid

T g – 124o C

CTE 1/2 - 13/53 ppm

K - 3.2W/m.K

Spiral flow – 127cm

Shin-Etsu

(X-43-3248-1A) Biphenyl resin, 77 Vol%

Al2O3 + SiO2 hybrid

T g – 120o C

CTE 1/2 - 12/47ppm

K - 4.3W/m.K

Spiral flow – 78cm

Shin-Etsu

(X-43-3248-1C) Biphenyl resin, 75 Vol%

Al2O3 + SiC hybrid

T g – 122o C

CTE 1/2 – 12/47ppm

K = 4.7W/m.K

Spiral flow – 70cm

Kyocera (G1250HT4) Low molecular weight,

79% Al2O3 + SiO2 hybrid

T g – 130o C

CTE 1/2 - 14/54ppm

K = 4.6W/m.K

Spiral flow – 105cm

Sumitomo (X80744) Biphenyl resin, 77 Vol%

Al2O3 fillers

T g – 130o C

CTE 1/2 = 10/35ppm

K = 5.0W/m.K

Spiral flow – 90cm

* All the data reported in Table 4 are suppliers’ data

3.3. High K Molding Compound Assembly Issues

Figure 9 shows the overall process flow for the FCMB3 and FCMB4 over-molded package. The first step is to pre-bake the strips from underfill (CUF) module to drive off moisture, after which the out going strips is subjected to a plasma treatment to activate the surface in order to enhance the adhesion with the substrates. The following step is molding followed by a post mold cure to complete the cross-linking of the polymers.

Figure 9. Assembly process flow for FCMB4/FCMB3 discrete overmold packages.

One of the key challenges associated with the high K molding compound formulation is the significant increase in melt viscosity. As shown in Table 4, the molding compound viscosity increases significantly with an increase in filler loading. This may result in a range of issues due to the tight mold clearance between the die. In Table 5 mechanical models predicted that the mold cap requirements for a 5 Watts package needs to be < 100um thick if a 3.2W/m.K molding compound material were used.

Table 5.T j max estimation for 10W power dissipation.

Thermal conductivity (W/m.K)

Mold

clearance 0.8 3.2 5.0 10 20 250 um 179.4 116.1 108.5 101.8 98.4 150 um 145.6 107.7

103.1 99.1 97.0 100 um 128.8 103.4 100.4 97.7 96.4 50 um 111.9 99.2 97.7 96.4 95.7 Besides incomplete fill, other key issues associated with the mold flowability are mold flow marks, shown in Figure 10. This phenomenon occurs only on molding compound formulations with very low spiral flow, (e.g X-43-3248-1A). Although flow mark may not have any known reliability implications, it may impact the 2 dimension unit identification (2DID) readability and may also fail the customers’ quality acceptance criteria. From the process perspective, lowering the molding temperature may help to improve mold flow marks. However the only complication is a potential reduction in adhesion.

Figure 10. Mold flow marks on the strip after cure.

3.4. Key Challenges: Excessive Strip Warpage Managing incoming strip warpage and subsequently keeping the strips flat throughout the assembly pipeline is the biggest assembly challenge for the FCMB4 platform. This is important; because high strip warpage has been known to interact with the downstream modules such as ball attach and saw singulation resulting in yield loss. Embedding glass cloths into the substrate build up layers helps to improve the overall strip warpage; but it’s still insufficient to drive the warpage below the limits acceptable by the downstream modules as shown in Figure 11. Mechanical modeling predicted that the glass cloth locations would have a certain degree of influence on the overall strip warpage. It was predicted that the Joslin TV with the bottom layer glass cloth would have the lowest strip warpage, followed by the center layer glass cloths. On the other hand, glass cloth layers also have its own set of

disadvantages, including limitations on the package design rules and a higher cost target. In this section our discussions will center on the warpage response for the Joslin DLL3 1 layer glass cloth TV with different molding compound materials.

Figure 11. Dynamic warpage for Joslin and Wilmot.

Figure 12 compares the cluster level warpage of

ShinEtsu X-43-3248-1C, Kyocera G1250GT-4 and the Sumitomo X80744 high K molding compound formulations. Warpage measurements on the incoming strips showed that the strips are warped in the ‘smiley’ directions. Once the post mold cured, the strip warpage increased in the ‘smiley’ direction for both the X-43-3248-1C and G1250GT4. This trend was nevertheless different for the Sumitomo X80744 molded strip, with

the warpage direction changing from ‘smiley’ to ‘crying’ after post mold cure process.

Figure 12. Strip level warpage comparison at different process steps.

As discussed, the strip warpage mechanism is typically influenced by the T g , CTE and modulus of the molding compound. One example is the increase in strip warpage along the smiley directions for X-43-3248-1C and G1250GT4 material. This is due to its low T g , which results in higher expansion of the mold due to the transformation from crystalline to a rubbery phase at temperatures above T g . In addition strip warpage is influenced by the mold compound shrinkage during the curing process. For example it is believed that the polymeric shrinkage of the X80744 mold during the curing process triggers a compressive force towards the substrate resulting in changes in warpage magnitude from “smiley’ to ‘crying’ as shown in Figure 13. To reduce the cure and thermal shrinkage, various reiterations have been previously investigated. This includes the addition of silicone micro phases which reacts with the resin system to expand the domains against the polymerization shrinkage.

(4) Post (3) Post mold cure (2) Post mold

(1) Post underfill

Figure 13.

Warpage mechanism at different process steps: (1)

Substrate warp because of CTE mismatch with die (2) Infliction in

warpage direction after post mold cure because of mold shrinkage (3)

Slight reduction in warpage because of relaxation in polymer chains with extended cure (4) Post singulation warpage.

P o s t m o l d I n c o m i n g I n c o m i n g I n c o m i n g P o s t c u r e P o s t c u r e P o s t c u r e P o s t c u r e

P o s t m o l d P o s t c u r e P o s t m o l d P o s t m o l d P o s t m o l d P o s t m o l d I n c o m i n g P o s t c u r e I n c o m i n g I n c o m i n g

4. High K Mold Compound Reliability

Issues

4.1. Introduction

Passing the stipulated reliability stress test is an integral requirement for package certification. This requires the units to pass electrically (E-Test) at Level 3 preconditioning (L3P), and the subsequent readouts of unbiased highly accelerated stress test (HAST) 130o C/85%RH for 100 hours or temperature cycle profile B for up to 1000 cycles respectively. At every intermediate read out, the packages are screened with scanning acoustic microscope C-mode (CSAM) to check for any abnormalities at the interface.

4.2. Reliability Fall Outs

Table 6 lists the reliability data for the X-43-3244-2 molding compound at different reliability stress read outs. Two defects, namely mold-die delamination and mold cracking, were observed from the CSAM screening and will be discussed in further detail in the following subsections.

Table 6. Reliability fall out for mold-die delam and mold crack . EOL L3P uHAST (50hr) TCB (500X) BHAST

(2V)

Mold-die 0/430 19/430 1/99 23/99 23/23

Mold

crack

0/160 0/160 0/80 34/80 NA

4.3. Reliability Issues: Mold-Die Delamination

Figure 14 shows the CSAM and cross-section images on a unit with mold-die delamination after the L3P stress test. From the CSAM images, it was clear that mold-die delamination occurred only at the corners of the die. Cross sections revealed that mold-die delamination had a high potential risk of incurring electrical failures because

of propagation along the mold to die path towards the mold-underfill interface.

Figure 14. CSAM images of mold-die delamination (R) and cross section images of the delamination (L).

The root cause for mold-die delamination is suspected to be a combination of poor adhesion and high peel stress at the corners of the die. This hypothesis was supported by the die thickness data in Figure 15, which concurred that the thicker dies (270um) have a significantly lower fall out than the thinner die (225um). The reason is packages with a thicker mold cap warps more due to the dominance of the molding compound, which exerts more peel stress at the corners of the silicon.

Figure 15. X-43-3244-2 mold-die delamination fall out for two

different die thickness (225um and 270um).

One of the solution paths considered to resolve mold-die delamination, was to increase the adhesion of the molding compound to the silicon interface. Therefore a new molding compound, X-43-3248-1, formulated with the biphenyl resin as its matrix, was brought in for further evaluation. Besides having good adhesion, the

biphenyl resin is also known to have low moisture uptake compared to the higher T g multifunctional resin. Figure 16 shows the results for the button shear test which was conducted after the post mold cure and L3P stress. The results showed that the X-43-3248-1 had adhesion strength in the magnitude of 30% higher compared to the X-43-3244-2 and the silica filled KMC2500VAT1. However the strength degrades marginally after the L3P stress test due to thermal degradation on the polymer matrix.

Figure 16. Mold-die adhesion strength comparison between the X-43-3248-1 with the X-43-3244-2 and KMC2500VAT1.

Table 7 shows the results for the X-43-3248-1 molding compound formulation at different reliability stress read

outs. The result after L3P + uHAST 130oC/85%RH 100 hours is clean from any mold-die delamination. However when subjected to L3P + TCB500X stress, all of the 40 units loaded into the stress chamber failed for mold-die delamination based on CSAM inspections. This observation showed that the mold-die delamination defect observed on X-43-3248-1 molding compound is not moisture driven defect but is due to stress, aggravated by the low T g (124o C), which falls within the

range of the TCB profile.

Table 7. X-43-3248-1 fall out for mold-die delam.

Mold compoun

d EOL L3P

uHAST

(50hr)

TCB (500X)

X-43-3248-1

0/80 0/80 0/40 40/40

Besides evaluating different molding compound formulations, equal focus was given to assessing the risk for mold-die delamination from the thermal perspective.

Thermal modeling using the finite element method was

carried out to comprehend the gain in maximum junction temperature (T jmax ) if a delamination is present at the corners of the die. A sensitivity model for different

cumulative areas of delamination - 0.5%, 2%, 10%, 20%, 30% and 40% - was constructed to predict the minimum cumulative area of delamination that would be 270um/225um/490um 490um

Post mold cure

Post L3P stress X-43-3244-2 X-43-3248-1

KMC2500VAT1

required before a significant rise in temperature will be

observed.

The result for the sensitivity model shown in Figure 17, suggests that the rise in die corner temperature would be significant only if the total area of delamination for the four corners exceeds 10%, while the rise in die center temperature would be significant only if the total delamination area exceeds 40%. Therefore based on the modeling results, it was concluded that the thermal risk induced by the mold-die delamination defect is low, because none of the packages post reliability stress have a total delamination area exceeding 10%.

Figure 17. Temperature rise at die center, die corner and mold top for different corner defects assumptions.

4.4. Reliability Issues: Post TCB Mold-crack

Table 8 quantifies the number of units with mold cracks at different reliability stress read out. The results showed that mold crack occurred only during the temperature cycle profile B (TCB) reliability stress test, which indicates that mold cracking is a thermo-mechanical stress induced defect. Visual observations in Figure 18 on all the CSAM images showed that the cracks initiate from the high stress edges of the 2DID and the Instruction set for execution (ISET) mark, indicating that flaw is pre-requisite for crack propagation to occur.

Table 8. Reliability fall out for mold crack at different stress read out .

EOL L3P

uHAST (50hr)

TCB

(500X) TCB (1000X)

Mold

crack 0/160 0/160 0/80 34/80 40/53

Figure 18. Mold crack CSAM images at different stress read out.

The key concern with mold cracking is the potential propagation of the crack length towards the silicon, which would result in units failing electrically due to die cracking shown in Figure 19. It was also observed that the units with mold cracks have resulted in mold-die delamination, which is a risk for thermal dissipation if the delamination exceeds 10% of the total area. To comprehend the root cause of mold cracking, a lab scale simulation GRC focusing on two possible root causes, molding compound formulation or laser mark depth was carried out as shown in Table 9. The motivation for including a non high K mold compound leg was to comprehend if the higher CTE of the high K molding compound could have induced more stress compared to a non high K mold formulation. This GRC was carried out by pre-heating the units on a hot plate at 300o C for 10 minutes before being soaked in liquid nitrogen for another 10 minutes to simulate the TCB stress test. This was repeated for a total of 4 cycles, with visual inspections being carried out for mold cracking after every cycle.

Figure 19. Die crack from a post decap mold crack unit.

Table 9. Lab scale GRC leg to decouple mold crack root cause.

Molding compound Laser power (Watts) High K mold 1.43W 2.04W Non high K mold

1.43W

2.04W

The results in Table 9 showed that there was no mold crack observed for either the high and non high K molding compound after 4 cycles on the units marked with a 1.43 Watts laser power. On the other hand, units which were marked with a 2.04 Watts laser power showed mold cracking after 1 cycle of temperature simulation. This clearly showed that mold cracking is caused by the difference in mark depth induced by the different laser power. Hence it’s important to control the laser power and laser pulse of the 2DID to reduce the overall mark depth. The setback of doing so is the possible degradation in contrast for the 2DID readability.

Therefore for risk mitigation, the other option, which was pursued without having to reduce the mark depth, was to move the 2DID mark away from the die shadow region to reduce the corner stress. This was based on the mechanical modeling quasi-static analysis, which

showed that the higher stress region was within the die shadow because of the higher CTE mismatch between the mold-die compared to the mold-substrate interface shown in Figure 20.

Figure 20. Die crack from a post decap mold crack unit.

5. Long Gellation Compression Mold for

ESM packages

5.1. Motivation for (ESM) Packaging Technology

Exposed second level interconnect molding (ESM), was an innovative packaging solution evaluated by the FCMB4 pathfinding team to resolve die paddle indentation shown in Figure 21. Our observations

showed that die paddle indentation occurs after the chip attach process, due to CTE differences between the die and substrate. The magnitude of die paddle indentation is influenced by three factors, which are the die thickness, package form factor and copper density. Mechanical modeling has shown that a reduction in package form factor, increase in die thickness and copper density, helps to reduce the magnitude of die paddle indentation.

Figure 21. Die paddle indentation on the SLI side after CAM reflow.

The key concern with die paddle indentation is controlled collapsed chip connection (C4) open joints resulting in package electrical opens. To resolve the die paddle indentation, the DLL3 strips have to be physically stiff prior to the chip attach process. Therefore, the ESM process option, which involves the molding the second level interconnect (SLI) solder spheres prior to chip attach was evaluated as shown in Figure 22 as a potential solution path.

Figure 22. Exposed second level interconnect molding process flow.

The molding process for the ESM packages can be done with either the transfer or compression molding technique, using a mold film to obtain the desired the mold cap thickness as shown in Figure 23. The mold film thickness is determined from the targeted mold cap thickness, based on the rule of thumb which specifies that a molding film is compressible up to 30% of its total thickness. Conventional molding techniques for package on package (PoP), such as top gate molding, are deemed unsuitable for FCMB4 due to the tight package Z height requirements. Besides warpage, the key challenges for the ESM packages are: (1) Incomplete mold fill due to

the tight ball pitch; (2) Inconsistent mold cap thickness; (3) Mold interactions with SLI solder spheres/paste.

Figure 23. DLL3 strips before and after molding on the SLI.

Mold film

Figure 24. Mold film for control of mold cap thickness.

5.2. Materials Response for ESM Packages

The lack of available legacy information, for the team to leverage from such as mold ability, warpage controls and heat dissipation, proved to be a huge challenge for the FCMB4 pathfinding team. Therefore for a start, flow, mechanics and thermal modeling were heavily relied on to provide the 1st cut assessments. Thermal modeling in Figure 25 indicated that there is no additional margin gained in T jmax if either high K (5W/m.K) or non high K (0.8w/m.K) molding compound was used. This is because the heat dissipation path for the ESM packages is through the top side of the package via natural convection rather than through the bottom side towards the board.

Conventional process flow

Figure 25. Comparison of PoP options in thin enclosure.

From the mechanics perspective, it was proposed that a low CTE, high T g molding compound material would be most suitable to drive a reduction in unit level warpage. Since molding is carried out prior to the chip-attach and underfill processes, the strips would have to undergo two additional heat cycles. Therefore by choosing a lower CTE and higher T g material the strips would be subjected to less thermo-mechanical mismatching with the substrates, thus reducing the amount of residual stress formed within the package upon cool down.

Besides heat dissipation and warpage, the other key assembly issue which was observed during the assembly of the ESM packages was incomplete mold fill. This was attributed to the restriction in mold flow because of the tight ball pitch (~0.413mm) and mold clearance requirements. From the assembly perspective, the mold clearance was targeted to be less than 50% of the total ball height to ensure that there was sufficient exposed solder for the surface mount process. As discussed in section 2.4, one of the key differences between transfer in the compression mold process is the mechanism of the mold flow. The flow for the compression mold process is dictated by gravitational/ capillary effect. This requires the compression mold formulation to have low gellation and low viscosity characteristics to address the concern of incomplete fill.

In summary it was agreed upon that the molding compound properties that are most suitable for the ESM packages need to be a long gellation, low CTE, high T g non high K molding compound, which is a contrasting difference from the requirements for an over molded package. Examples of some of the formulations which were brought in during the FCMB4 pathfinding are shown in Table 10.

Table 10. ESM molding compound candidates’ comparison.

Supplier

(Materials)

Material description Key properties

Hitachi

CEL9240HF10Z

Baseline material

Silica filled biphenyl

resin + multi aromatic

T g – 125o C

CTE 1/2 – 10/39ppm

K – 0.8W/m.K

Spiral flow – 120cm

Hitachi

CEL9470HF10Z

High Tg, high CTE

SiO2 filled LMW

biphenyl

T g – 145o C

CTE 1/2 – 9/38 ppm

K – 0.8W/m.K

Spiral flow – 146cm

Hitachi

CEL9740HF10Z

High Tg, low CTE

SiO2 filled LMW

biphenyl

T g – 149o C

CTE 1/2 - 8/32ppm

K – 0.8W/m.K

Spiral flow – 101cm

Shin-Etsu

(X-43-3248-1A)

Low T g. High CTE

Biphenyl resin, 77 Vol%

Al2O3 + SiO2 hybrid

T g – 127o C

CTE 1/2 – 12/49ppm

Spiral flow – 97.5m

Modulus -38.9GPa

Shin-Etsu

(X-43-3248-2F)

Middle T g. High CTE

Biphenyl resin, 75 Vol%

Al2O3 + SiO2 hybrid

T g – 134o C

CTE 1/2 – 12/49ppm

Spiral flow – 95cm

Modulus – 29.8 GPa

* All the data reported in Table 7 are suppliers’ data

5.3. ESM Assembly Challenges: Package Warpage Figure 26 compares the dynamic warpage response for Joslin CUF only 0 glass cloth (no molding) with ESM 0 glass cloth as a function of temperature. The dynamic warpage response is literally the same for both options, with package warpage changing from convex to concave at higher temperatures due to changes in the effective CTE and modulus after glass transition temperature. In comparison the overall warpage magnitude for the ESM packages is lower than the CUF only packages. This is attributed to the molding compound restraining the overall strip warpage at room and high temperature.

Figure 26. Dynamic warpage response comparing CUF.

Figure 27 shows the unit level coplan results for all the four different molding compound materials described in Table 7. Based on the results shown, it’s clear that the unit with the lowest coplan is the X-43-3248-1A material, followed by the CEL9470HF10Z, SEC-X-43-3248-2F and CEL9740HF10Z, respectively. This observation shows that the effect of warpage is primarily dominated by the modulus of the materials, followed by T g and CTE as secondary modulators. Modulus plays an effective role in warpage controls by virtue of locking the strips down after the molding process, while T g and

CTE is consistent with the mechanical model predictions in section 5.2 that described the impact of residual stress on strip warpage during cool down.

Figure 27. Unit level coplan for different molding compound materials.

Besides molding compound formulation, warpage is also influenced by other dimensional properties like the mold

cap thickness. Figure 28 is a sensitivity study comparing the warpage magnitude for 100, 150 and 200um at both end of line (EOL) and surface mount (SMT) temperatures. Results showed that EOL warpage reduction was more pronounced with a thicker mold cap compared to a thinner mold cap. However the drive for an increase in the mold cap thickness is very much dependant on the ball size used. Hence it’s important to strike a balance between SMT and mold cap thickness.

Figure 28. Package flatness as a function of mold cap thickness.

5.3. Key challenges: Molding Residue on Ball

One of the key technology challenges in enabling

compression molding for ESM packages is mold residue on ball, shown in figure 29. Surface analysis on the mold residue with Energy Dispersive X-Ray Spectroscopy

(EDX) showed that the residue is a combination of mold resin and fillers. During the compression process, the solder spheres come into direct contact with the molding compound granules resulting in the impregnation of mold on the solder spheres. The main concerns with the mold residue on ball are test rejects due to the high resistance on ball and SMT non wet.

Figure 29. Mold residue on ball after compression molding process.

To address the concerns highlighted above, various methods were evaluated to remove the mold residue from the ball. One of the techniques is laser de-flash, which uses optical imaging to target only specific mold residue spots with a 1064nm, 3-20W, 5kHZ pulsed laser ablation. Results showed that laser ablation is effective in removing resin from the molding compound but has limitations in removing portions which are filled with alumina fillers (e.g. X-43-3248-1A formulation). This is because alumina filler is opaque to ultra-violet rays. At very high fluences, it is possible to ablate alumina, but when it’s distributed in the mold as 25um spheres, the laser cannot go directly after the alumina. Instead the ablation occurs around the surrounding resin, thus holding the particle in place.

Besides laser ablation, jet deflux for residue removal was

also evaluated. The jet deflux system shown in Figure 30 is a mechanical process involving high pressure water system heated at 80o C. The key challenge for this technology option is ball oxidation due to presence of moisture and temperature, which could further induce non wet concerns at SMT.

Figure 30. Mold residue removal with the jet deflux system.

5.4. Key Challenges: Mold Cap Thickness

Mold cap thickness consistency is a challenge for the ESM package due to high ball count and tight ball pitch (~0.413mm). Mold cap thickness variation is important as it can significantly impact the warpage performance of the package. Figure 31 compares the mold cap thickness for compression mold and transfer mold with results showing a significantly higher variation for the transfer mold compared to the compression mold with the same molding compound material (CEL9240HF10Z). This data clearly shows that

compression mold has better scalability compared to the transfer mold for thinner mold cap.

Figure 31. Mold cap thickness for transfer and compression mold.

Besides warpage mold cap thickness is also known to play a role in solder extrusion after second reflow. The mechanism shown in Figure 32, describes how solder extrusion occurs during the 2nd reflow. During the chip

attach reflow, the Tin Silver Copper (SAC) 405 solder alloys at the SLI will melt, undergoing a transformation from solidus to liquidus state at peak temperature of 230o C. At the same time, huge thermo-mechanical stresses develop around the ball because of package warpage, resulting in force acting towards the molten alloy. Once the threshold of force developed exceeds the surface tension of the molten alloy, solder extrusion would occur.

Figure 32. Solder extrusion mechanism during 2nd

reflow.

The key to addressing solder extrusion is to reduce the effective thermo-mechanical stresses acting towards the solder spheres. One way is to reduce the mold cap thickness used for the SLI molding. Our results in Figure 33 comparing two different mold cap thickness (135um and 200um) showed no solder extrusion with the thinner mold cap for a 280um solder ball. From this finding it’s important to define the right mold cap thickness to balance between package warpage and solder extrusion.

Figure 33. Comparison of the impact of different mold cap thickness towards solder extrusion.

4. Conclusions

The roadmap for the next generation molding compound is being shaped by the need to have good warpage controls and excellent heat dissipation qualities. Various technology challenges with respect to flow, stress and thermal will continue to push the boundaries of manufacturability. Hence materials formulations, new equipment technologies and innovative packaging architectures have to be continuously developed to ensure scalability for future FCMX platforms.

Acknowledgments

The authors would like to acknowledge the following individuals for their contributions in this manuscript: Gilbert De Guia, Sean Chan, Lam Pooi Kit, Eric Yong, Wang Kang Ji for mold-die delamination and mold crack data, Rudge Vethayanagam and Wong Au Seong for data on the ESM, Sim Huay Huay for cross-sections on the solder extrusion units, David Xu for initiating the trans high K molding compound development.

References

[1] C. Gurumurthy & H. Azimi., “Challenges in HDI substrates,’

Intel Assembly and Test Technology Journal, available on-line, Intel intranet, https://www.sodocs.net/doc/0117221314.html, . Volume 10, 2007.

[2] J. Brand et al., “Compression mold: A manufacturable low

temperature molding solution,’ Intel Assembly and Test Technology Journal, available on-line, Intel intranet, https://www.sodocs.net/doc/0117221314.html, . Volume 9, 2006.

[3] R. Viswanath et al., “Thermal performance challenges for silicon

to systems,’ Intel Technology Journal, available on-line, Intel intranet, https://www.sodocs.net/doc/0117221314.html, . Q3, 2000.

[4] D. Tracy, L. Nguyen, R. Giberti, A. Gallo, C. Bischof, J.N.

Sweet, and A.W. Hsia, “Reliability of aluminum nitride filed mold compound,” in Proc. IEEE Electronic Components and Technol. Conf. (ECTC), San Jose, CA, May. 18-21, 1997, pp.72-77.

Intel ?

is a registered trademark of Intel Corporation or its subsidiaries

in the United States and other countries.

*Other brands and names are the property of their respective owner.

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VLOOKUP函数地使用方法

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数据压缩实验指导书

目 录 实验一用C/C++语言实现游程编码 实验二用C/C++语言实现算术编码 实验三用C/C++语言实现LZW编码 实验四用C/C++语言实现2D-DCT变换13

实验一用C/C++语言实现游程编码 1. 实验目的 1) 通过实验进一步掌握游程编码的原理; 2) 用C/C++语言实现游程编码。 2. 实验要求 给出数字字符,能正确输出编码。 3. 实验内容 现实中有许多这样的图像,在一幅图像中具有许多颜色相同的图块。在这些图块中,许多行上都具有相同的颜色,或者在一行上有许多连续的象素都具有相同的颜色值。在这种情况下就不需要存储每一个象素的颜色值,而仅仅存储一个象素的颜色值,以及具有相同颜色的象素数目就可以,或者存储一个象素的颜色值,以及具有相同颜色值的行数。这种压缩编码称为游程编码,常用(run length encoding,RLE)表示,具有相同颜色并且是连续的象素数目称为游程长度。 为了叙述方便,假定一幅灰度图像,第n行的象素值为: 用RLE编码方法得到的代码为:0@81@38@501@40@8。代码中用黑体表示的数字是游程长度,黑体字后面的数字代表象素的颜色值。例如黑体字50代表有连续50个象素具有相同的颜色值,它的颜色值是8。 对比RLE编码前后的代码数可以发现,在编码前要用73个代码表示这一行的数据,而编码后只要用11个代码表示代表原来的73个代码,压缩前后的数据量之比约为7:1,即压缩比为7:1。这说明RLE确实是一种压缩技术,而且这种编码技术相当直观,也非常经济。RLE所能获得的压缩比有多大,这主要是取决于图像本身的特点。如果图像中具有相同颜色的图像块越大,图像块数目越少,获得的压缩比就越高。反之,压缩比就越小。 译码时按照与编码时采用的相同规则进行,还原后得到的数据与压缩前的数据完全相同。因此,RLE是无损压缩技术。

vlookup函数使用说明

VLOOKUP函数 使用举例 如图 vlookup函数示例 所示,我们要在A2:F12区域中提取100003、100004、100005、100007、100010五人的全年总计销量,并对应的输入到I4:I8中。一个一个的手动查找在数据量大的时候十分繁琐,因此这里使用VLOOKUP函数演示: 首先在I4单元格输入“=Vlookup(”,此时Excel就会提示4个参数。

Vlookup结果演示 第一个参数,很显然,我们要让100003对应的是I4,这里就输入“H4,” ; 第二个参数,这里输入我们要查找的区域(绝对引用),即“$A$2:$F$12,”; 第三个参数,“全年总计”是区域的第六列,所以这里输入“6”,输入“5”就会输入第四季度的项目了; 第四个参数,因为我们要精确的查找工号,所以留空即可。 最后补全最后的右括号“)”,得到公式“=VLOOKUP(H4,$A$2:$F$12,6)”,使用填充柄填充其他单元格即可完成查找操作。 VLOOKUP函数使用注意事项 说到VLOOKUP函数,相信大家都会使用,而且都使用得很熟练了。不过,有几个细节问题,大家在使用时还是留心一下的好。 一.VLOOKUP的语法 VLOOKUP函数的完整语法是这样的: VLOOKUP(lookup_value,table_array,col_index_num,range_lookup) 1.括号里有四个参数,是必需的。最后一个参数range_lookup是个逻辑值,我们常常输入一个0字,或者False;其实也可以输入一个1字,或者true。两者有什么区别呢?前者表示的是完整寻找,找不到就传回错误值#N/A;后者先是找一模一样的,找不到再去找很接近的值,还找不到也只好传回错误值#N/A。这对我们其实也没有什么实际意义,只是满足好奇而已,有兴趣的朋友可以去体验体验。 2.Lookup_value是一个很重要的参数,它可以是数值、文字字符串、或参照地址。我们常常用的是参照地址。用这个参数时,有三点要特别提醒:A)参照地址的单元格格式类别与去搜寻的单元格格式的类别要一致,否则的话有时明明看到有资料,就是抓不过来。特别是参照地址的值是数字时,最为明显,若搜寻的单元格格式类别为文字,虽然看起来都是123,但是就是抓不出东西来的。

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